Device and process for treating fine particles

Coating apparatus – Gas or vapor deposition – Means to coat or impregnate particulate matter

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Details

118715, 118719, 118723, 118725, C23C 1600

Patent

active

049915410

ABSTRACT:
A device for treating fine particles is provided which comprises a plural number of reaction chambers for providing reaction fields different from each other provided along the flow pathway on the downstream side of a nozzle which jets out fine particles in a beam. The device may be provided with a chamber for a starting material for forming fine particles. The nozzle may be a convergent-divergent nozzle.

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Maissel, Handbook of Thin Film Technology, McGraw Hill Book Co., .COPYRGT.1970, chapter 2, pp. 5-7.

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