Method of fabricating self-aligned heterojunction bipolar transi

Details Method of fabricating self-aligned heterojunction bipolar transi Method of fabricating self-aligned heterojunction bipolar transi

1992-09-09

1994-09-06

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437133, 437984, 257200, 148DIG72, H01L 21265

Patent

active

053447867

ABSTRACT:
A method of fabricating heterojunction bipolar transistors (HBTs) including epitaxial growth of collector, base and emitter layers, allowing for self-aligned emitter-base contacts to minimize series base resistance and to reduce total base-collector capacitance.

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