Quartz used in semiconductor manufacturing device, apparatus for

Industrial electric heating furnaces – Glass furnace device

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373109, 65 301, C03B 5193, C03C 1500

Patent

active

058810900

ABSTRACT:
An inner chamber is arranged inside an outer chamber and stores quartz crystal powder. A space is defined between the inner chamber and the outer chamber, and an oxygen gas is introduced into that space. The quartz crystal powder is supplied from the inner chamber into a burner section, together with the oxygen gas. The burner section is also supplied with a flammable gas from a gas control device. The flammable gas contains an NH.sub.3 gas. The heat produced by the combustion of the flammable and oxygen gases fuses the quartz crystal powder supplied from the inner chamber into the burner section. As a result, quartz containing nitrogen is produced. The nitrogen is contained in the fused quartz in an amount which is expressed as 1 to 10% by molar ratio.

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patent: 5096479 (1992-03-01), Allen et al.
patent: 5620559 (1997-04-01), Kikuchi
patent: 5668067 (1997-09-01), Araujo et al.

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