Thin film semiconductor device and method for producing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...

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257 65, 257 57, 257 59, 257347, 438158, 438159, 438160, H01L 2978, H01L 21236

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active

060435127

ABSTRACT:
A thin semiconductor film device according to the present invention includes an insulative substrate, a metal layer formed on the insulative substrate, and a metal oxide layer formed on the metal layer. The metal oxide layer is obtained from anodization of the metal layer. In a preferred embodiment, an insulation film of silicon oxide or silicon nitride is formed on the metal oxide layer, and a semiconductor layer obtained by crystallizing the amorphous silicon layer is formed on the insulation film.

REFERENCES:
patent: 5821559 (1998-10-01), Yamazaki et al.

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