Scanning probe microscope using fluorescent light

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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Details

250306, 2504591, H01J 314, G01N 2300, F21V 916

Patent

active

059862564

ABSTRACT:
Disclosed is a scanning probe microscope using fluorescent light, comprising a lever section including a probe, an actuator for moving the probe and a sample relative to each other, a light source unit arranged at a position suitable for permitting at least one of the probe and the sample to be irradiated with light having a first wavelength or a second wavelength, which is emitted from the light source unit, and a detecting unit arranged at a position suitable for optically detecting the positional relationship between the probe and the sample, wherein a first fluorescent material, which emits light having the second wavelength when excited with light of the first wavelength, is imparted to one of the probe and the sample, a second fluorescent material, which emits light having a third wavelength when excited with light having the second wavelength, is imparted to the other of the probe and the sample, and the detecting unit optically detects the positional relationship between the probe and the sample based on the light having the third wavelength.

REFERENCES:
patent: 4700225 (1987-10-01), Hara et al.
patent: 4963752 (1990-10-01), Landis et al.
patent: 5091652 (1992-02-01), Mathies et al.
patent: 5479024 (1995-12-01), Hillner et al.
patent: 5581082 (1996-12-01), Hansma et al.

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