Force sensing vibrating beam resonator

Details Force sensing vibrating beam resonator Force sensing vibrating beam resonator

1987-04-14

1988-05-10

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310323, 310338, H01L 4108

Patent

active

047437901

ABSTRACT:
A vibrating beam resonator is formed with a unitary isolator mass at each end of the vibratory beam. Isolator springs connected to the unitary masses are joined to mounts. Forces applied to the mounts cause the vibrating beam frequency to vary to enable precise force measurements. With this arrangement, fewer cutting operations are required to produce the vibrating beam resonator than were necessary with known resonators. In a preferred embodiment, a side of the vibratory beam is formed by an edge of the crystal blank from which the resonator is cut to further reduce cutting time. This also permits cuts to be made from only one side of the blank.

REFERENCES:
patent: 4321500 (1982-03-01), Paros et al.
patent: 4445065 (1984-04-01), Albert
Prior Art of Single Isolator Beam Resonator by W. C. Albert, Jul. 1978.
Force Sensing Using Quartz Crystal Flexure Resonators, by W. C. Albert, 38th Ann Freq Control Symposium--1984, pp. 233-239.
Technical Report on the Quartz Resonator Digital Accelerometer by N. R. Serra, Inertial Navigation: Systems and Components Proceedings AGARD Conference, May 1968, (AGARD CP), pp. 487-516.

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