Switched capacitor transducer

Details Switched capacitor transducer Switched capacitor transducer

1992-02-25

1994-09-06

Chilcot, Jr., Richard E.

Measuring and testing

Dynamometers

Responsive to force

73517B, G01L 100

Patent

active

053437667

ABSTRACT:
A micromachined accelerometer includes two capacitors comprising a pair of fixed capacitor electrodes and an intermediate movable proof mass serving as a common electrode which is displaced under acceleration to differentially vary the capacitances. A circuit holds the common electrode at a bias voltage and a switching circuit rapidly alternating between two phases separately connects the fixed electrodes to a main reference voltage and to ground during a first phase and to a common intermediate voltage during a second phase. A charge amplifier senses capacitance changes due to acceleration to produce an output voltage and an attenuating amplifier responsive to the output voltage produces the common intermediate voltage. A compensation servo circuit responsive to the output voltage generates the bias voltage which controls an electrostatic balancing force which is applied to the proof mass during the first phase to maintain the proof mass near a rest position. Alternatively, the bias voltage is a constant value for open loop operation.

REFERENCES:
patent: 4791352 (1988-12-01), Frick et al.
patent: 5054320 (1991-10-01), Yvon
patent: 5083091 (1992-01-01), Frick et al.
patent: 5150275 (1992-09-01), Lee et al.
"A Switched-Capacitor Interface for Capacitive Pressure Sensors", Yamada et al.; IEEE Trans. Instr. and Meas., vol. 41, No. 1 (1992).
"Switched-Capacitor Frequency-to-Voltage and Voltage-to-Frequency Converters Based on Charge-Balancing Principle", Matsumoto et al., ISCAS, IEEE 2221, (1988).

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