Parallel-detection electron energy-loss spectrometer

Details Parallel-detection electron energy-loss spectrometer Parallel-detection electron energy-loss spectrometer

1987-08-10

1988-05-10

Church, Craig E.

Radiant energy

Electron energy analysis

250396ML, 250396R, H01J 4944

Patent

active

047437561

ABSTRACT:
Quadrupole electron lenses 21, 22, 23 and 24 are disposed between an energy-dispersing device 15 and a parallel detector 50 in an electron energy-loss spectrometer. The power and polarity of the quadrupole lenses may be adjusted to simultaneously provide the desired energy dispersion of the spectrum, and a precise match between the width of the spectrum and the width of the parallel detector. Additional quadrupole lenses may be interposed between quadrupole lens 24 and the detector 50 to further increase the energy dispersion.

REFERENCES:
patent: 3541328 (1970-11-01), Enge
patent: 4174479 (1979-09-01), Boerboom
Crewe, Isaacson & Johnson, A high resolution electron spectrometer for use in transmission scanning electron microscopy, Rev. Sci./wk. 42(4), 411.varies.420.
Sherman & Koust, Quantitative data processing of parallel recorded electron energy loss spectra with low signal to background, Rev. Sci./wk. 56(2), 231-239.
Johnson, Csillay, Monson & Stern, A photodiode, parallel detection system for energy loss spectrometry, 39th Annual EMSA meeting Proc.
Design of a Parallel detection system for EELS, Egerton, 39th Annual EMSA meeting Proc.

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