Semiconductor wafer carrier

Details Semiconductor wafer carrier Semiconductor wafer carrier

1998-05-12

1999-11-16

Breneman, Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

451287, 451288, B24B 3700

Patent

active

059850949

ABSTRACT:
The carrier assembly includes an internal pressurized fluid circuit which places an incompressible fluid layer between a pressure plate and an internal diaphragm. The internal diaphragm has a flexible portion providing gimbal action for the carrier assembly. The diaphragm and hydrostatic forces of the internal fluid circuitry combine to form a gimbal action exhibiting low friction, but which is otherwise rigid in other axes.

REFERENCES:
patent: 3595555 (1971-07-01), Cameron
patent: 3731435 (1973-05-01), Boettcher et al.
patent: 3977130 (1976-08-01), Degner
patent: 4193226 (1980-03-01), Gill, Jr. et al.
patent: 4194324 (1980-03-01), Bonora et al.
patent: 4270314 (1981-06-01), Cesna
patent: 4313284 (1982-02-01), Walsh
patent: 4466852 (1984-08-01), Beltz et al.
patent: 4897966 (1990-02-01), Takahashi
patent: 4918869 (1990-04-01), Kitta
patent: 4918870 (1990-04-01), Torbert et al.
patent: 5081795 (1992-01-01), Tanaka et al.
patent: 5193316 (1993-03-01), Olmstead
patent: 5205082 (1993-04-01), Shendon et al.
patent: 5230184 (1993-07-01), Bukhman
patent: 5267418 (1993-12-01), Currie et al.
patent: 5310104 (1994-05-01), Zaidel et al.
patent: 5423558 (1995-06-01), Koeth et al.
patent: 5423716 (1995-06-01), Strasbaugh
patent: 5441444 (1995-08-01), Nakajima
patent: 5443416 (1995-08-01), Volodarsky et al.
patent: 5449316 (1995-09-01), Strasbaugh
patent: 5472374 (1995-12-01), Yamada
patent: 5476414 (1995-12-01), Hirose et al.
patent: 5527209 (1996-06-01), Volodarsky et al.
patent: 5571044 (1996-11-01), Bolandi et al.
patent: 5582534 (1996-12-01), Shendon et al.
patent: 5582540 (1996-12-01), Su et al.
patent: 5584746 (1996-12-01), Tanaka et al.
patent: 5584751 (1996-12-01), Kobayashi et al.
patent: 5588902 (1996-12-01), Tominaga et al.
patent: 5602058 (1997-02-01), Ooizimi et al.
patent: 5605488 (1997-02-01), Ohashi et al.
patent: 5643053 (1997-07-01), Shendon
patent: 5651724 (1997-07-01), Kimura et al.
patent: 5670011 (1997-09-01), Togawa et al.
patent: 5679065 (1997-10-01), Henderson
patent: 5681215 (1997-10-01), Sherwood et al.
patent: 5720849 (1998-02-01), Yokosuka et al.

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