Stock material or miscellaneous articles – Composite
Patent
1997-01-31
1999-03-09
Shah, Mukund J.
Stock material or miscellaneous articles
Composite
428447, 428448, 428457, H01L 2176, H01L 23522, C08G 6102
Patent
active
058798080
ABSTRACT:
Multi-level structures including a first layer with a parylene polymer layer deposited thereon. The parylene polymer layer has the structure: ##STR1## m is an integer having a value of 0, 1, 2, 3 or 4, and z is greater than 1. G is a halogen, an alkyl group, a cyclo hydrocarbon, an alkylene group or an alkylyne group having the general formula C.sub.n H.sub.y X.sub.w. X is a halogen, and n is an integer greater than zero. The sum of y and w is at most equal to a 2n+1. The parylene polymer layer can have a zinc impurity level of about 66 parts per billion or less. The parylene polymer layers are formed by a process in which monomers are formed outside of a deposition zone of a vacuum chamber. The monomers may be prepared by a process in which a parylene dimer is vaporized and subsequently pyrolized. The process may further include the step of passing the vapor through a post-pyrolysis zone prior to depositing the monomer on the substrate.
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Beach William F.
Olson Roger A.
Wary John
Alpha Metals, Inc.
Rao Deepak R.
Shah Mukund J.
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