Pod loader interface

Details Pod loader interface Pod loader interface

1995-03-07

1999-11-16

Keenan, James W.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414217, 414411, 414940, B65G 4907

Patent

active

059846100

ABSTRACT:
The pod loader interface is a machine that is able to automatically open a SMIF pod and unload the contents thereof. An elevator raises the SMIF cover away from its base to reveal the wafer boat contained in the SMIF pod. An articulated arm thereafter reaches through an opening in a bulkhead of the machine, securing the wafer cassette and withdrawing it through the hole in the bulkhead. The wafer cassette is then placed in position to be operated upon by the next step in the manufacturing process. The machine includes an integrated clean air system to provide a clean environment for the wafers.

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