Piezoelectric thin-film element and ink-jet recording head using

Details Piezoelectric thin-film element and ink-jet recording head using Piezoelectric thin-film element and ink-jet recording head using

1996-12-20

1999-11-16

Lund, Valerie

Incremental printing of symbolic information

Ink jet

Ejector mechanism

347 70, B41J 2295

Patent

active

059844582

ABSTRACT:
A substrate; a silicon dioxide film formed on the substrate; a platinum lower electrode formed on the silicon dioxide film; a piezoelectric film formed on the platinum lower electrode; and an upper electrode formed on the piezoelectric film, wherein the relationship between a film thickness (X) of the platinum lower electrode and a film thickness (Y) of the silicon dioxide film satisfies conditions of

REFERENCES:
patent: 3268453 (1966-08-01), Ouchi et al.
patent: 5265315 (1993-11-01), Hoisington et al.
patent: 5530465 (1996-06-01), Hasegawa et al.
patent: 5585136 (1996-12-01), Barrow et al.
Japanese Journal of Applied Physics, vol. 32, No. 9B, Sep. 1993, pp. 4144-4146; XP000615120; Sameshima K. et al.: Preparation of Pb(Zr, Ti)O.sub.3 Pt/Ti/Ta Electrodes by Sol-Gel.

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