Interferential linear and angular displacement apparatus having

Details Interferential linear and angular displacement apparatus having Interferential linear and angular displacement apparatus having

1993-09-21

1995-06-13

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, 250237G, G01B 902

Patent

active

054248337

ABSTRACT:
An interferential apparatus and method for measuring displacement in which phase displaced signals may be generated by the proper selection of a light source and the division periods of a plurality of gratings.

REFERENCES:
patent: 4360273 (1982-11-01), Thaxter
patent: 4776701 (1988-10-01), Pettigrew
patent: 5009506 (1991-04-01), Spies
patent: 5104225 (1992-04-01), Masreliez
patent: 5180910 (1993-01-01), Spratte et al.
patent: 5214280 (1993-05-01), Rieder
Willhelm, Jorg, "Dreigitterschrittgeber, Photoelektrische Aufnehmer Zur Messung von Lageanderungen," pp. 1-96, 1978.

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