Method of manufacturing active matrix panel

Fishing – trapping – and vermin destroying

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437181, 437 51, 437 59, 357 237, 350332, H01L 21265

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active

050325310

ABSTRACT:
In a first manufacturing step of an active matrix liquid-crystal panel, a transparent conductor film and a metal film are sequentially accumulated on a substrate in this order so as to form a two-layer film. The two-layer film including the transparent conductor film and the metal film is subjected to photoetching to simultaneously form at least a pixel electrode (transparent conductor film) and a gate electrode (metal film) of a thin-film transistor according to a predetermined pattern. In a fabrication process near the end of the fabrication, when the source and drain electrodes of the thin-film transistors are formed, the metal film on the pixel electrode is simultaneously removed. Since the removal of the metal film protecting the pixel electrode is simultaneously achieved at a point near the final process, protection of the pixel electrode is guaranteed, thereby realizing improvement of the yielding and reduction of the production process.

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patent: 4821092 (1989-04-01), Noguchi
patent: 4933296 (1990-06-01), Parks et al.
patent: 4935792 (1990-06-01), Tanaka et al.
patent: 4943143 (1990-07-01), Yamashita

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