Projection exposure apparatus and semiconductor device manufactu

Details Projection exposure apparatus and semiconductor device manufactu Projection exposure apparatus and semiconductor device manufactu

1994-09-26

1995-06-13

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 71, G03B 2742, G03B 2772

Patent

active

054248035

ABSTRACT:
A projection exposure apparatus includes an illumination optical system for constituting illumination source for illuminating an original having an exposure pattern, the illumination optical system including changing mechanism for changing a shape of the illumination source; a projection optical system for projecting an image of the exposure pattern onto a surface to be exposed; an adjuster responsive to the changing mechanism to adjust the projection optical system.

REFERENCES:
patent: 4589769 (1986-05-01), Matsuki
patent: 4739373 (1988-04-01), Nishi et al.
patent: 4754307 (1988-06-01), Burki et al.
patent: 4814829 (1989-03-01), Kosugi et al.
patent: 4851882 (1989-07-01), Takahashi et al.
patent: 4939630 (1990-07-01), Kikuchi et al.
patent: 4988188 (1991-01-01), Ohta
patent: 5061956 (1991-10-01), Takubo et al.
patent: 5121160 (1992-06-01), Sano et al.
patent: 5144362 (1992-09-01), Kamon et al.
patent: 5160962 (1992-11-01), Miura et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5251067 (1993-10-01), Kamon
patent: 5253040 (1993-10-01), Kamon et al.
patent: 5262822 (1993-11-01), Kosugi et al.
patent: 5264898 (1993-11-01), Kamon et al.
patent: 5286963 (1994-02-01), Torigoe
patent: 5337097 (1994-08-01), Suzuki et al.

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