Tool for peeling turntable polishing cloth

Details Tool for peeling turntable polishing cloth Tool for peeling turntable polishing cloth

1998-02-05

1999-03-09

Darling, John P.

Winding, tensioning, or guiding

Convolute winding of material

With particular material connection to take-up

438692, H01L 21304

Patent

active

058789731

ABSTRACT:
A peeling tool for peeling a polishing cloth from a turntable includes a cloth pinching member for pinching a polishing cloth, and a cylindrical take-up cylinder having a cloth insertion slit formed in its outer peripheral surface. Cloth pinching portions of the cloth pinching member are protruded as tongues. Tip ends of upper and lower cloth pinching portions are shifted from each other in a protruded direction. The cloth pinching member is provided with a viewing hole through which the polishing cloth can be observed. The cloth pinching member having the pinching portions pinching the polishing cloth is contained within the take-up cylinder, and the polishing cloth is peeled from the turntable by rotating the take-up cylinder by a ratchet.

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