Method of manufacturing a chip-type piezoelectric-resonator

Details Method of manufacturing a chip-type piezoelectric-resonator Method of manufacturing a chip-type piezoelectric-resonator

1994-02-17

1996-04-09

Vo, Peter

Metal working

Piezoelectric device making

29417, 29423, 29856, 310340, 310366, 333187, H01L 4122, H03H 917, H03H 302

Patent

active

055049800

ABSTRACT:
In order to define cavities for vibrating spaces in a chip-type piezoelectric-resonator, which is protected with resin so as to be capable of surface mounting, a mother substrate including a piezoelectric substrate and a plurality of piezoelectric resonance elements formed thereon is prepared, and upraised adhesive layers in the form of walls are provided on respective major surfaces of the mother substrate so as to enclose the vibrating region of the mother substrate. Mother sheets, which are provided with plural cover sheets, are arranged so as to cover both the major surfaces of the mother substrate, thereby defining cavities for vibrating spaces therebetween. Then, protective resin members are applied to cover both the major surfaces of the mother substrate, which in turn is divided to obtain a plurality of chip-type piezoelectric-resonators.

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