SOS transistor structure

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357 20, 357 4, H01L 2978, H01L 2906, H01L 2712

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active

049690230

ABSTRACT:
A MOS transistor is formed in a silicon layer applied on an insulating base. The channel region of the transistor has a weakly doped region located nearest the surface of the layer and a more heavily doped region nearest the base. The latter region extends in under the source region of the transistor and is connected to the source contact of the transistor via a highly doped region of the same conduction type. The more heavily doped region is doped with a doping dose of at least 2.10.sup.12 cm.sup.-2.

REFERENCES:
patent: 4797721 (1989-01-01), Hsu
Toshio Kumamoto, et al., "An SOI Structure for Flash A/D Converter" IEEE Journal of Solid-State Circuits, vol. 23, No. 1, Feb., 1989, pp. 198-201.

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