Method for manufacturing a VDMOS transistor

Fishing – trapping – and vermin destroying

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437 41, 437 6, 437150, 148DIG126, H01L 218232

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active

054242312

ABSTRACT:
A VDMOS transistor having a reduced drain/source resistance without a corresponding decrease in breakdown voltage and a manufacturing method therefor. Such a VDMOS transistor is created by gradually increasing the doping density of the transistor's implanted regions, while simultaneously increasing the respective thicknesses of the gate oxide layers corresponding to the implanted regions along the current flow path.

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patent: 5250450 (1993-10-01), Lee et al.

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