Stacked v-cell capacitor using a disposable composite dielectric

Details Stacked v-cell capacitor using a disposable composite dielectric Stacked v-cell capacitor using a disposable composite dielectric

1990-11-05

1992-10-13

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 52, 437 58, H01L 21265, H01L 2170

Patent

active

051550571

ABSTRACT:
A stacked v-cell (SVC) capacitor using a modified stacked capacitor storage cell fabrication process. The SVC capacitor is made up of a polysilicon structure, having a v-shaped cross-section, located at a buried contact and extending to an adjacent storage node overlaid by polysilicon with a dielectric sandwiched in between. The addition of the polysilicon structure increases storage capability 70% without enlarging the surface area defined for a normal stacked capacitor cell.

REFERENCES:
patent: 4742018 (1988-05-01), Kimura et al.
patent: 5071781 (1991-10-01), Seo et al.

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