Sextupole system for the correction of spherical aberration

Details Sextupole system for the correction of spherical aberration Sextupole system for the correction of spherical aberration

1979-10-25

1981-12-01

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

3133611, G21K 108, H01J 314, H01J 326

Patent

active

043038646

ABSTRACT:
A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses.

REFERENCES:
patent: 3753034 (1973-08-01), Spicer
patent: 3781732 (1973-12-01), Wollnik

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