Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1979-07-24
1981-03-10
Dixon, Harold A.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250305, 250310, G21K 108, G21N 2300, H01J 3900
Patent
active
042556619
ABSTRACT:
An electrostatic emission lens arrangement for producing a microparticle ge of a surface by means of charged particles emitted from such surface and accelerated to a predetermined final energy level. Such arrangement includes two apertured diaphragms arranged in spaced relationship to each other and to the emitting surface, and a voltage biasing source for producing a potential difference between the surface and the adjacent first apertured diaphragm electrode, and a potential difference between the first apertured diaphragm electrode and the second apertured diaphragm electrode. According to the invention the spacing distance between the emitting surface and first apertured diaphragm electrode and the spacing distance between the two apertured diaphragm electrodes and, the relationship between the potentials of the surface and of the electrodes are so dimensioned that the charged particles are accelerated between the emitting surface and the first apertured diaphragm electrodes to a multiple of the desired final energy level, and that the particles are retarded to the desired final energy level in passing between the two apertured diaphragm electrodes.
REFERENCES:
patent: 3582649 (1971-06-01), Taylor
patent: 3760180 (1973-09-01), Weber
patent: 4179604 (1979-12-01), Christou
Dixon Harold A.
Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.v.
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