Wafer carrier

Details Wafer carrier Wafer carrier

1991-09-12

1992-10-13

Johnson, Blair M.

Supports: racks

Special article

Platelike

206454, 118500, A47G 1908

Patent

active

051543010

ABSTRACT:
A moldable plastic, distortion and warp resistant wafer carrier with forked end wall portions that tie into the sidewalls of the carrier. The forked end wall portions from triangular column like supports between an end wall and sidewalls of the carrier such that the carrier maintains structural integrity even when its temperature fluctuates between ambient and 180.degree. C. temperatures in a relatively short time period. The structural integrity of the carrier is further enhanced by the end wall having an integrally formed bend which is disposed at a right angle relative to the forked end wall portions.

REFERENCES:
patent: 4687097 (1987-08-01), Mortensen
patent: 4949848 (1990-08-01), Kos
patent: 5042671 (1991-08-01), Bischoff et al.

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