Boots – shoes – and leggings
Patent
1982-08-02
1983-10-18
Chin, Gary
Boots, shoes, and leggings
364167, 318567, G05B 1918
Patent
active
044109512
ABSTRACT:
A positioning apparatus employing a piezo worm type shifting mechanism in which the position of a platform to be moved to a desired position is measured with a position measuring device and data representing the position thus measured is applied to a microprocessor. The microprocessor calculates the phase of a voltage corresponding to the distance through which the platform should be moved to arrive at the desired position. The digital output is subjected to digital-to-analog conversion and a pulsive voltage produced thereby the magnitude of which corresponds to the distance to be moved. The pulsive voltage is applied directly to expanding and contracting piezoelectric elements which move the platform. The platform is thereby positioned at the desired position at a high speed and with a high accuracy.
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"X-Ray Lithography" Nakayama et al., Published in Review of the Electrical Communication Laboratories, vol. 27, Numbers 1-2, Jan.-Feb. 1979, pp. 105-115.
"Progress in X-Ray Lithograph" McCoy et al., Published in Sixth Int. Conf. of Electron Beam & Ion Beam Science & Technology, 1974, pp. 3-22.
Nakamura Takuma
Sugizaki Kazumi
Chin Gary
Vlsi Technology Research Association
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