Optical: systems and elements – Lens – With reflecting element
Patent
1996-01-31
1998-09-08
Epps, Georgia Y.
Optical: systems and elements
Lens
With reflecting element
359730, 359732, 355 53, G02B 1700, G03B 2742
Patent
active
058053565
ABSTRACT:
A projection exposure apparatus achieves good imaging performance as securing a sufficient working distance. This projection exposure apparatus has a projection optical system for projection-transferring a real-size image of a first object onto a second object, which is disposed between the first object and the second object. This projection optical system has a cemented lens consisting of a plano-convex lens and a first negative meniscus lens, a second negative meniscus lens, and path-bending prisms for guiding light from the first object to the plano-convex lens and for guiding light from the concave mirror to the second object. The present invention is based on finding of appropriate ranges of refractive powers of the first and second negative meniscus lenses and appropriate ranges of Abbe numbers of glass materials for the first and second negative meniscus lenses.
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Epps Georgia Y.
Nikon Corporation
Schwartz Jordan M.
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