Method of preparing high purity white phosphorus

Details Method of preparing high purity white phosphorus Method of preparing high purity white phosphorus

1984-02-17

1986-10-21

Doll, John

Chemistry: physical processes

Physical processes

23294R, 423322, B01D 310

Patent

active

046183450

ABSTRACT:
Liquid white phosphorus is distilled from red phosphorus in vacuo at 480.degree.-490.degree. C. The vapor is transferred in a conduit maintained at 250.degree. C. and condensed into liquid white phosphorus at room temperature. The liquid white phosphorus is then filtered to eliminate any condensed red phosphorus. The clear, colorless phosphorus produced may be utilized as a source of P.sub.4 species for chemical vapor deposition, sputtering, vacuum deposition, and molecular beam deposition of phosphorus, polyphosphide, and other phosphorus compound films for semiconductor and other applications including insulation and passivation.

REFERENCES:
patent: 4483746 (1984-11-01), Rosenhouse et al.

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