Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1984-08-13
1988-02-09
Niebling, John F.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
118 501, 118723, 204298, 427 37, 427 47, C23C 1422
Patent
active
047240580
ABSTRACT:
Method and apparatus for arc evaporating a large target having a surface area of at least about 20 square inches, including a device for confining the arc to the target surface and a magnetic field source for establishing at least one magnetic field in a predetermined direction over the target surface to thus direct the cathode spot of the arc in a direction substantially perpendicular to the direction of the magnetic field and accordingly effect substantially uniform evaporation of the target by the arc where the magnetic field may be either pulsed or continuous.
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D. Hadfield, Permanent Magnets and Magnetism, Iliffe Books Ltd., London, 1963, pp. 213-214.
Ferguson Jr. Gerald J.
Foycik, Jr. Michael J.
Hoffman Michael P.
Leader William T.
Niebling John F.
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