Ion beam separators

Details Ion beam separators Ion beam separators

1975-07-07

1977-04-12

Smith, Alfred E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250298, 250400, H05K 306

Patent

active

040174034

ABSTRACT:
In an ion beam separator for use in ion implantation, the ion beam is scanned in both X and Y directions over a target. `Y` scan is achieved by electrostatic beam deflection located close to the region where the ion beam exits from the influence of the deflecting magnet. `X` scan is preferably provided by rectilinear target movement. Beam width or intensity control is achieved using a rotatable slit. Targets are transferred sequentially across the beam from a pack on one side and are re-stacked on the other side of the beam after exposure.

REFERENCES:
patent: 2816231 (1957-12-01), Nygard
patent: 3682729 (1972-08-01), Gukelberger, Jr. et al.
patent: 3689766 (1972-09-01), Freeman
patent: 3705320 (1972-12-01), Freeman

Affiliated with

Also associated with

Rating

Ion beam separators does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ion beam separators, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ion beam separators will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1280230