Process for making sol-gel deposited ferroelectric thin films in

Details Process for making sol-gel deposited ferroelectric thin films in Process for making sol-gel deposited ferroelectric thin films in

1989-08-28

1993-03-30

Beck, Shrive

Coating processes

Heat decomposition of applied coating or base material

4271262, 4271263, 4274193, 4274192, 427379, 427380, B05D 302

Patent

active

051982692

ABSTRACT:
A method for producing a thin film of a ferroelectric perovskite material having the steps of providing a first substrate; depositing a first layer of a sol-gel perovskite precursor material wherein the crystallization of this precursor material to the pervoskite phase is insensitive to the first substrate; depositing a second layer of a sol-gel perovskite precursor material wherein the crystallization is sensitive to the first substrate; and heat-treating the deposited layers to form ferroelectric perovskites. A heat treatment step to form perovskites may optionally follow the deposition of the first layer. The first layer of sol-gel perovskite precursor material is selected to produce a perovskite upon heat treatment of: lead titanate (PbTiO.sub.3), or strontium titanate (SrTiO.sub.3). The second layer of sol-gel perovskite precursor material is selected to produce a perovskite upon heat treatment of: lead zirconate titanate (Pb(Zr,Ti)O.sub.3), lead zirconate (PbZrO.sub.3), lead lanthanum titanate ((Pb,La)TiO.sub.3), lead lanthanum zirconate ((Pb,La)ZrO.sub.3), lead lanthanum zirconate titanate ((Pb,La)(Zr,Ti)O.sub.3), lead magnesium niobate (Pb(Mg.sub.1/3 Nb.sub.2/3)O.sub.3), lead zinc niobate (Pb(Zn.sub.1/3 Nb.sub.2/3)O.sub.3), barium titanate (BaTiO.sub.3), strontium barium titanate ((Sr,Ba)TiO.sub.3), barium titanate zirconate (Ba(Ti,Zr)O.sub.3), potassium niobate (KNbO.sub.3), potassium tantalate (KTaO.sub.3), or potassium tantalate niobate (K(Ta,Nb)O.sub.3).

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