Methods of fabricating low pressure silicon transducers

Details Methods of fabricating low pressure silicon transducers Methods of fabricating low pressure silicon transducers

1976-01-14

1977-04-12

Tupman, W.

Metal working

Method of mechanical manufacture

Assembling or joining

29585, 29590, 29591, 29610SG, 338 2, B01J 1700

Patent

active

040166449

ABSTRACT:
A low pressure transducer and methods of fabricating the same employ piezoresistive bridges deposited on or diffused within a wafer of n-type silicon, the wafer is secured to a glass sheet and is then bonded to a silicon diaphragm of a relatively large size and fabricated from a distinct piece of silicon of non-critical electrical characteristics. Methods for producing a plurality of such devices by using compatible processing steps are also provided.

REFERENCES:
patent: 3764950 (1973-10-01), Wallia
patent: 3922705 (1975-11-01), Yerman
patent: 3953920 (1976-05-01), Endo

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