Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1976-01-14
1977-04-12
Tupman, W.
Metal working
Method of mechanical manufacture
Assembling or joining
29585, 29590, 29591, 29610SG, 338 2, B01J 1700
Patent
active
040166449
ABSTRACT:
A low pressure transducer and methods of fabricating the same employ piezoresistive bridges deposited on or diffused within a wafer of n-type silicon, the wafer is secured to a glass sheet and is then bonded to a silicon diaphragm of a relatively large size and fabricated from a distinct piece of silicon of non-critical electrical characteristics. Methods for producing a plurality of such devices by using compatible processing steps are also provided.
REFERENCES:
patent: 3764950 (1973-10-01), Wallia
patent: 3922705 (1975-11-01), Yerman
patent: 3953920 (1976-05-01), Endo
Kulite Semiconductor Products Inc.
Plevy Arthur L.
Tupman W.
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