Method to reduce the height of the bird's head in oxide isolated

Details Method to reduce the height of the bird's head in oxide isolated Method to reduce the height of the bird's head in oxide isolated

1986-05-01

1987-09-01

Munson, Gene M.

357 54, 357 55, H01L 2704, H01L 2934, H01L 2906

Patent

active

046912223

ABSTRACT:
The bird's heads of a local oxidation process are minimized by performing a polishing or grinding step to reduce the height of the bird's head down to a plane using the oxide inhibiting mask of the local oxidation process as a polishing stop.

REFERENCES:
patent: 3900350 (1975-08-01), Appels et al.
patent: 3961999 (1976-06-01), Antipov
patent: 4002511 (1977-01-01), Magdo et al.
patent: 4088516 (1978-05-01), Kondo et al.
patent: 4104086 (1978-08-01), Bondur et al.
patent: 4373252 (1983-02-01), Caldwell
patent: 4435898 (1984-03-01), Gaur et al.
patent: 4580331 (1986-04-01), Soclof

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