Photonic device having an integal guide and method of manufactur

Details Photonic device having an integal guide and method of manufactur Photonic device having an integal guide and method of manufactur

1998-07-08

2000-11-21

Palmer, Phan T. H.

Optical waveguides

Integrated optical circuit

385 49, 385 50, 385 65, 385 83, G02B 612

Patent

active

061514306

ABSTRACT:
A process is provided for creating microstructure coupling guides for aligning photonic devices with optical signal carrying apparatuses. The process includes applying a photoresist to a semiconductor material, spinning the semiconductor material, baking the semiconductor material, exposing the photoresist, baking the semiconductor material a second time, and developing the resist. The process creates a microstructure that acts as an integral guide to align and maintain the relative position between an optical signal carrying apparatus and a photonic device.

REFERENCES:
patent: 4307935 (1981-12-01), Monnier
patent: 4779946 (1988-10-01), Pimpinella et al.
patent: 4826275 (1989-05-01), Pimpinella et al.
patent: 4882245 (1989-11-01), Gelorme et al.
patent: 5355386 (1994-10-01), Rothman et al.
patent: 5359687 (1994-10-01), McFarland et al.
patent: 5420954 (1995-05-01), Swirhun et al.
patent: 5466558 (1995-11-01), Sasaki
patent: 5526454 (1996-06-01), Mayer
patent: 5631988 (1997-05-01), Swirhun et al.
patent: 5644667 (1997-07-01), Tabuchi
"Mechanical Characterization of a New High-Aspect-Ratio Near UV-Photoresist", Lorenz et al., Date and Publication Unknown.
"Micromachining applications of a high resolution ultratick photoresist", Lee et al., J. Vac. Soc. Technol. B., vol. 13, No. 6, Aug. 1995, pp. 3012-3016.
"Nano0 SU-8 Resist" Product Information, Microlithography Chemical Corp., Mar. 28, 1997.
Book--Optoelectrics For Data Communication, Radcliffe et al., 1995, pp. 160-163.

Affiliated with

Also associated with

Rating

Photonic device having an integal guide and method of manufactur does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Photonic device having an integal guide and method of manufactur, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photonic device having an integal guide and method of manufactur will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1265427