Process for manufacturing high frequency quartz resonators

Details Process for manufacturing high frequency quartz resonators Process for manufacturing high frequency quartz resonators

1986-02-04

1987-10-27

Goldberg, Howard N.

Metal working

Piezoelectric device making

430316, 156650, 156651, H01L 4108, H01L 4110

Patent

active

047019875

ABSTRACT:
The resonator obtained by this process comprises an active central portion, the thickness of which is reduced until the desired frequency is obtained. This may be of the order of 50 to 100 MHz. This central portion is surrounded by a considerably thicker reinforcing frame to which it is mechanically connected by means of one or more connecting members which are thinner than the active portion. The connecting member or members eliminate the need for coupling between the reinforcing frame and the active portion. Electrodes are provided for exciting the resonator.

REFERENCES:
patent: 3432205 (1969-01-01), Skaggs et al.
patent: 3694677 (1972-09-01), Guttwein et al.
patent: 3872411 (1975-03-01), Wanatabe et al.
patent: 3930857 (1976-01-01), Bendz et al.
patent: 4012648 (1977-03-01), Engdahl
patent: 4135108 (1979-01-01), Besson

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