Transducer

Measuring and testing – Fluid pressure gauge – Vibration type

Patent

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Details

73705, 73723, 25023119, 2502011, G01L 914

Patent

active

049427660

ABSTRACT:
In a transducer, e.g. a pressure transducer, the sensing element comprises a torsional oscillator provided with magnetic means for feedback of signals to maintain oscillation. Typically the sensing element is formed by selective etching from a body of single crystal silicon.

REFERENCES:
patent: 4379226 (1983-04-01), Sichling et al.
patent: 4503715 (1985-03-01), Greenwood
patent: 4691578 (1987-09-01), Herzl
patent: 4772786 (1988-09-01), Langdon

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