Process for fabricating a thin-film solar battery

Details Process for fabricating a thin-film solar battery Process for fabricating a thin-film solar battery

1986-05-15

1987-09-01

Weisstuch, Aaron

Fishing, trapping, and vermin destroying

136244, 136258, 437 7, 437226, 437181, H01L 3118, H01L 2714

Patent

active

046898743

ABSTRACT:
A process for fabricating a thin-film solar battery is provided having one or more unit cells each having a thin-film semiconductor active region formed over a transparent dielectric substrate and being in contact with a transparent electrode on the substrate side and with a metal electrode on the opposite side. Layers of a transparent conductive film, a semiconductor film, and a metal film are successively formed over the substrate and each other, and the respective films are successively scribed by a laser to form separate, related layers which in turn form the cells. An opaque layer is formed on a portion of the substrate remote from the cells, is scribed by a laser, and serves as a marker so the substrate can be properly aligned during the scribing steps.

REFERENCES:
patent: 4594471 (1986-06-01), Yamazaki
S. Yamazaki et al., Chapter 4.3, "Laser Scribing Lithography", in JARECT, vol. 16, Amorphous Semiconductor Technologies and Devices (1984), Y. Hamakawa, Editor, North Holland Pub. Co., 1984, pp. 149-167.

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