Confocal microscopic equipment

Optical: systems and elements – Compound lens system – Microscope

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Details

359386, 356376, G02B 2100

Patent

active

061116904

ABSTRACT:
A confocal microscopic equipment for measuring the solid shape of a sample at high speeds, and which does not require scanning of an irradiating light beam, wherein are provided a light source, apertures on which the output beam from the light source is irradited, an objective lens that forms stationary images of the apertures on the sample and collects the reflected or fluorescent light from the sample, a photo detector, and a beam splitter that makes the beam that has passed through the apertures incident to the objective lens by means of transmission or reflection and focuses the output beam from the objective lens on the photo detector by reflection or transmission.

REFERENCES:
patent: 4806004 (1989-02-01), Wayland
patent: 5225671 (1993-07-01), Fukuyama
patent: 5248876 (1993-09-01), Kerstens et al.
patent: 5428475 (1995-06-01), Tanaami et al.
patent: 5734497 (1998-03-01), Yano et al.
patent: 5737084 (1998-04-01), Ishihara

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