Double-sided fluid sensor for reduced attenuation of shear trans

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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73 2401, 73 2406, 73 6453, 73 6179, 310313B, H01L 4108

Patent

active

053213319

ABSTRACT:
A fluid sensing device such as a Surface Transverse Wave device or a Love Wave device having controlled transfers of energy from a transduction surface of a piezoelectric substrate to a sensing surface and back to the transduction surface. A first wave-trapping structure adjacent to an input transducer tapers to provide a controlled diffraction of shear transverse wave energy to a second wave-trapping structure disposed on an opposite side of the piezoelectric substrate. The second wave-trapping structure interfaces with the fluid under test. The shear transverse waves are then recaptured by a third wave-trapping structure on the same surface as the first wave-trapping structure. The wave energy is then decoupled from the piezoelectric substrate. In the STW device, the wave-trapping structures are periodic fingers that are selectively varied in thickness or width or both. In the LW device, the wave-trapping structures are plates that each vary in thickness.

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