Shielded capacitive pressure sensor

Details Shielded capacitive pressure sensor Shielded capacitive pressure sensor

1999-09-15

2000-11-21

Noori, Max

Measuring and testing

Fluid pressure gauge

Diaphragm

73718, G01L 912

Patent

active

061486744

ABSTRACT:
A capacitive pressure transducer which is shielded so that water or another fluid with a relatively high dielectric constant can be measured more accurately, as the sensor is unaffected by the relative tendency of the fluid to influence the measured capacitance, including an electrode associated with a diaphragm on a first side opposite a second, wetted, side coupled to the fluid, the diaphragm electrode being of the same or larger size than a second electrode separated therefrom by a gap, and the diaphragm electrode extending radially outward to or beyond an annular seal on or adjacent the wetted side confining fluid to an area within the outer peripheral confines of the diaphragm and within an area comprising a portion of the wetted side of the diaphragm opposite the diaphragm's electrode.

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