Low concentration gas delivery system utilizing sorbent-based ga

Details Low concentration gas delivery system utilizing sorbent-based ga Low concentration gas delivery system utilizing sorbent-based ga

1998-05-18

2000-08-29

Spitzer, Robert H.

Gas separation: processes

With control responsive to sensed condition

Pressure sensed

95 45, 95 95, 95106, 95133, 96 4, 96 10, 96113, 96144, 96147, B01D 5304

Patent

active

061102571

ABSTRACT:
A low concentration gas delivery system utilizing a sorbent-based gas storage and delivery unit including a gas storage and dispensing vessel joined in flow communication with a permeation structure. The storage and dispensing vessel contains a solid-phase physical sorbent medium holding a fluid, which is selectively dispensed from the vessel by pressure differential, concentration differential and/or thermal desorption techniques. The dispensed gas flows to the permeation structure, wherein the desorbed fluid is diffusionally released either as a neat fluid, or into a carrier gas in which the desorbed fluid has a precisely maintained concentration, for applications such as calibration of instruments monitoring fluid concentrations, delivery of dopants for fabrication of microelectronic device structures, or other end use application requiring a precise low concentration of fluid.

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