Process and device for analysis of nonconductive surfaces

Details Process and device for analysis of nonconductive surfaces Process and device for analysis of nonconductive surfaces

1989-12-14

1991-07-02

Evans, F. L.

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

356314, G01N 2166

Patent

active

050281330

ABSTRACT:
Process of analysis of surfaces by luminescent discharge spectrometry. The current used for the creation of the discharge between the anode (3) and the cathode (20) is a high-frequency current arriving on the nonconductive sample (21) to be analyzed and being propagated there by skin effect. Application is to the determination of the quality of surface coatings.

REFERENCES:
Lomdahl et al, Analytica Chimica Acta, vol. 148, Apr. 1, 1983, pp. 171-180.
Journal of Applies Physics, vol. 37, No. 2, Feb. 1966, pp. 574-579; P. D. Davidse et al: "Dielectric thin films trough rf sputtering" *pp. 574-575* p. 575, colonne de gauche, lignes 14-17.

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