Method for producing a layered piezoelectric element

Details Method for producing a layered piezoelectric element Method for producing a layered piezoelectric element

1996-04-05

1999-01-19

Rada, Rinaldi I.

Metal working

Piezoelectric device making

298901, 451 36, H04R 1700

Patent

active

058602020

ABSTRACT:
In a method of manufacturing a layered piezoelectric element 38 constructed from alternately stacked piezoelectric ceramic layers 40 and internal electrode layers 42, 44 and having a plurality of fine actuator portions 46, wherein the layered piezoelectric element 38 deforming the actuator portions 46 in the direction in which they are stacked, slit-shaped holes 52 are formed using ultrasonic wave abrasive particle machining after sintering the stacked body of green sheets 50, 51. The holes 52 are formed as through holes in the layered piezoelectric element 38. The actuator portions 46 are formed so as to be connected by non-through-hole portions 48 at both ends.

REFERENCES:
patent: 4523121 (1985-06-01), Takahashi et al.
patent: 5140773 (1992-08-01), Miwa et al.

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