Surface acoustic wave (SAW) pressure sensor structure

Details Surface acoustic wave (SAW) pressure sensor structure Surface acoustic wave (SAW) pressure sensor structure

1980-02-29

1984-06-12

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313B, 310346, H01L 4108

Patent

active

044544405

ABSTRACT:
A surface acoustic wave (SAW) pressure sensor is mechanically supported within a vacuum sealing structure by a cylindrical metal sleeve which isolates the SAW sensor substrate from induced thermal strain resulting from temperature cycling of the structure, and which provides for a fluid conduit through the vacuum environment from the sensor diaphragm to an orifice formed through the wall of the structure.

REFERENCES:
patent: 3978731 (1976-09-01), Reeder et al.
patent: 4019388 (1977-04-01), Hall et al.
patent: 4216401 (1980-08-01), Wagner

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