Optics: measuring and testing – By alignment in lateral direction
Patent
1995-05-25
1997-11-11
Font, Frank G.
Optics: measuring and testing
By alignment in lateral direction
356234, 356244, G01B 1100, G01J 140, G01N 2101
Patent
active
056869967
ABSTRACT:
A device is provided for aligning a laser. For example, such a device could be used to align a laser as part of a particle measurement device in a semiconductor process tool. The device consists of a rigid member with alignment marks which define the intended point of impingement of a beam emitted from the laser. The laser is moved to allow the emitted laser beam to extend upon the alignment device and impinge upon the alignment marks. When the laser beam impinges upon alignment marks, preferably formed near the center of the alignment device, the laser is determined to be in proper alignment. The device is configured having a outer circumference equal to the terminating element which the device replaces during the alignment procedure. The device is then removed from the semiconductor process tool and the terminating element, either a beam stop or a photodiode detector, is re-inserted. A procedure utilizing relatively few steps for properly aligning the laser is thereby provided.
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Fidler James K.
Markle Richard J.
Advanced Micro Devices , Inc.
Daffer Kevin L.
Font Frank G.
Stafira Michael P.
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