Method for determining the concentration of atomic species in ga

Details Method for determining the concentration of atomic species in ga Method for determining the concentration of atomic species in ga

1998-02-03

1999-11-23

Evans, F. L.

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

356318, G01N 2173, G01N 2163

Patent

active

059910208

ABSTRACT:
Method for determining the concentration of atomic species in gases and solids. Measurement of at least two emission intensities from a species in a plasma containing the species after a sufficient time period has elapsed after the generation of the plasma and during a second time period, permits an instantaneous temperature to be established within the sample. The concentration of the atomic species to be determined is then derived from the known emission intensity of a predetermined concentration of that species in the sample at the measured temperature, a quantity which is measured prior to the determination of the unknown concentration, and the actual measured emission from the unknown species, or by this latter emission and the emission intensity of a species having known concentration within the sample.

REFERENCES:
patent: 5446538 (1995-08-01), Noll
patent: 5715053 (1998-02-01), Loge

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