Projection exposure method and apparatus

Details Projection exposure method and apparatus Projection exposure method and apparatus

1994-08-10

1995-11-14

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, G03B 2772, G03B 2742

Patent

active

054671663

ABSTRACT:
In order to effect projection exposure at a great depth of focus without spoiling transfer fidelity even for a plurality of isolated patterns relatively close to one another, provision is made of a coherence reducing member CCM for reducing the coherency between imaging light in a central circular transmitting portion FA on or near the pupil plane (Fourier transform plane) of a projection optical system and imaging light in a marginal zonal transmitting portion FB, and a double focalizing member DFM for making the in-focus position of light passing through the circular transmitting portion FA and the in-focus position of light passing through the zonal transmitting portion FB differ in the direction of the optical axis of the projection optical system.

REFERENCES:
patent: 4992825 (1991-02-01), Fukuda et al.
patent: 5208629 (1993-05-01), Matsuo et al.
patent: 5323208 (1994-06-01), Fukuda et al.
patent: 5329333 (1994-07-01), Noguchi et al.
patent: 5348837 (1994-09-01), Fukuda et al.
patent: 5379090 (1995-01-01), Shiraishi

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