Particle detection and particle detector devices

Details Particle detection and particle detector devices Particle detection and particle detector devices

1997-10-06

1999-11-23

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With detector

313103CM, 313105CM, H01J 37244

Patent

active

059904836

ABSTRACT:
A particle detector for an electron microscope, a mass spectrometer or the like comprises a single flat plate electron multiplier such as a micro-channel plate or a micro-sphere plate followed by a scintillator. The use of the electron multiplier prior to the scintillator compensates for lack of efficiency in passing photons from the scintillator. The output voltage of the scintillator can be freely set.

REFERENCES:
patent: 3603832 (1971-09-01), Manley et al.
patent: 4217495 (1980-08-01), Robinson
patent: 4535249 (1985-08-01), Reeds
patent: 4988867 (1991-01-01), Laprade
patent: 4988868 (1991-01-01), Gray
patent: 5644132 (1997-07-01), Litman et al.
patent: 5717206 (1998-02-01), Watanabe et al.
James B. Pawley, Lvsem For High Resolution Topographic, "Electron Optical Developments", pp. 222-227.

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