Multi-dimensional precision micro-actuator

Details Multi-dimensional precision micro-actuator Multi-dimensional precision micro-actuator

1992-04-14

1993-01-12

Griffin, Donald

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

156630, H01L 21306

Patent

active

051794993

ABSTRACT:
Mechanically movable microstructure fabricated from a single crystal such as silicon and actuator structures for providing a high degree of controlled, precision motion of nanometer-scale.

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