Micromechanical rate of rotation sensor having ring with drive e

Details Micromechanical rate of rotation sensor having ring with drive e Micromechanical rate of rotation sensor having ring with drive e

1997-04-15

1999-03-30

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350412, G01P 904

Patent

active

058892079

ABSTRACT:
A rate of rotation sensor is structured as a micromechanical component on the surface of a substrate. The rate of rotation sensor has a ring with drive elements and detection elements. The ring is made to oscillate by means of the drive elements, and the deformation of the ring which results from Coriolis forces is detected by the detection elements.

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