Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1995-08-28
1998-07-07
Braun, Fred L.
Photocopying
Projection printing and copying cameras
Step and repeat
318640, 318649, G03B 2742
Patent
active
057777217
ABSTRACT:
A coordinate position of a stage for supporting a wafer or a reticle which is driven by a linear motor includes a stator and a mover is measured by a laser interferometer, and a thrust obtained from a deviation between the measured coordinate position and an aimed coordinate position is output to a multiplier. Further, a cosine function corresponding to a phase between the stator and the mover is obtained on the basis of the measured coordinate position and is output to the multiplier. Then, an exciting current is supplied to an armature coil of the linear motor on the basis of an output of the multiplier.
REFERENCES:
patent: 4282469 (1981-08-01), Moriyama
patent: 4525659 (1985-06-01), Imahashi et al.
patent: 4546299 (1985-10-01), Veale
patent: 4748478 (1988-05-01), Suwa et al.
patent: 4810941 (1989-03-01), Ohishi et al.
patent: 5003342 (1991-03-01), Nishi
patent: 5204535 (1993-04-01), Mizutani
patent: 5214489 (1993-05-01), Mizutani et al.
patent: 5243195 (1993-09-01), Nishi
patent: 5446519 (1995-08-01), Makinouchi
Braun Fred L.
Nikon Corporation
LandOfFree
Exposure method and apparatus with control of a linear motor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Exposure method and apparatus with control of a linear motor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure method and apparatus with control of a linear motor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1211804