Method and apparatus for automatically handling and identifying

Details Method and apparatus for automatically handling and identifying Method and apparatus for automatically handling and identifying

1983-10-03

1986-02-11

Trafton, David L.

Registers

Coded record sensors

Feed mechanisms

235454, 235383, 2504911, G06K 1304

Patent

active

045700583

ABSTRACT:
Apparatus for automatically selecting a semiconductor wafer out of a wafer cassette, and identifying the selected wafer. The apparatus (10) comprises means for accessing a selected individual semiconductor wafer (11) out of a plurality of wafers within a cassette (12), an arm (27) coupled to the accessing means for lifting the selected wafer partially out of the cassette, and a driving member (33) contacting the edge of the selected wafer and rotating the wafer to expose a predetermined portion thereof. An optical reader (37) is positioned proximate to the driving member for identifying information stored in the predetermined portion of the wafer (FIG. 1).

REFERENCES:
patent: 3820647 (1974-06-01), Waugh et al.
patent: 3865254 (1975-02-01), Johannsmeier
patent: 3972424 (1976-08-01), Levy et al.
patent: 3982627 (1976-09-01), Isohata
patent: 4095095 (1978-06-01), Muraoka et al.
patent: 4166574 (1979-09-01), Yokoyama
patent: 4333005 (1982-06-01), Takamatsu et al.
patent: 4436474 (1984-03-01), Brossman et al.

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